Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043933 | Integration sequences with top surface profile modification | Chien-Teh Kao, Xinliang Lu, Mei Chang, Hoiman Raymond Hung, Nitin K. Ingle | 2011-10-25 |
| 7994002 | Method and apparatus for trench and via profile modification | Mei Chang, Chien-Teh Kao, Xinliang Lu | 2011-08-09 |
| 7939422 | Methods of thin film process | Nitin K. Ingle, Jing Tang, Yi Zheng, Zheng Yuan, Xinliang Lu +4 more | 2011-05-10 |