Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053172 | Photoresists and methods for optical proximity correction | Scott D. Halle, Ranee W. Kwong, Pushkara R. Varanasi | 2011-11-08 |
| 8029975 | Fused aromatic structures and methods for photolithographic applications | James J. Bucchignano, Pushkara R. Varanasi, Roy R. Yu | 2011-10-04 |
| 8021828 | Photoresist compositions and methods related to near field masks | Ranee W. Kwong, Pushkara R. Varanasi | 2011-09-20 |
| 7960095 | Use of mixed bases to enhance patterned resist profiles on chrome or sensitive substrates | Wayne M. Moreau, Marie Angelopoulos, David R. Medeiros, Karen E. Petrillo | 2011-06-14 |
| 7944055 | Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures | Robert David Allen, Phillip Brock, Blake Davis, Qinghuang Lin, Alshakim Nelson +2 more | 2011-05-17 |
| 7901864 | Radiation-sensitive composition and method of fabricating a device using the radiation-sensitive composition | Marie Angelopoulos, Timothy A. Brunner, Dirk Pfeiffer, Ratnam Sooriyakumaran | 2011-03-08 |
| 7862982 | Chemical trim of photoresist lines by means of a tuned overcoat material | Sean D. Burns, Matthew E. Colburn, Steven J. Holmes | 2011-01-04 |