Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053172 | Photoresists and methods for optical proximity correction | Scott D. Halle, Wu-Song Huang, Pushkara R. Varanasi | 2011-11-08 |
| 8021828 | Photoresist compositions and methods related to near field masks | Wu-Song Huang, Pushkara R. Varanasi | 2011-09-20 |