Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053172 | Photoresists and methods for optical proximity correction | Scott D. Halle, Wu-Song Huang, Ranee W. Kwong | 2011-11-08 |
| 8034533 | Fluorine-free heteroaromatic photoacid generators and photoresist compositions containing the same | Sen Liu | 2011-10-11 |
| 8029975 | Fused aromatic structures and methods for photolithographic applications | James J. Bucchignano, Wu-Song Huang, Roy R. Yu | 2011-10-04 |
| 8021828 | Photoresist compositions and methods related to near field masks | Wu-Song Huang, Ranee W. Kwong | 2011-09-20 |
| 8017303 | Ultra low post exposure bake photoresist materials | Dario L. Goldfarb, Mahmoud Khojasteh | 2011-09-13 |