Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084193 | Self-segregating multilayer imaging stack with built-in antireflective properties | Joy Cheng, David R. Medeiros, Daniel P. Sanders, Dirk Pfeifer, Libor Vylicky | 2011-12-27 |
| 8017303 | Ultra low post exposure bake photoresist materials | Mahmoud Khojasteh, Pushkara R. Varanasi | 2011-09-13 |
| 7892705 | Photomask and method of making thereof | Sean D. Burns, Michael M. Crouse | 2011-02-22 |
| 7869002 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Kafal Lai | 2011-01-11 |