Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084185 | Substrate planarization with imprint materials and processes | Colin J. Brodsky, Ryan L. Burns | 2011-12-27 |
| 8080849 | Characterizing films using optical filter pseudo substrate | Shahin Zangooie, Lin Zhou | 2011-12-20 |
| 8053368 | Method for removing residues from a patterned substrate | Matthew E. Colburn, Steven J. Holmes | 2011-11-08 |
| 7994060 | Dual exposure track only pitch split process | Matthew E. Colburn, Steven J. Holmes | 2011-08-09 |
| 7968270 | Process of making a semiconductor device using multiple antireflective materials | Marie Angelopoulos, Katherina Babich, Richard A. Conti, Allen H. Gabor, Scott D. Halle +2 more | 2011-06-28 |
| 7914975 | Multiple exposure lithography method incorporating intermediate layer patterning | Allen H. Gabor, Scott D. Halle, Dirk Pfeiffer | 2011-03-29 |
| 7892705 | Photomask and method of making thereof | Michael M. Crouse, Dario L. Goldfarb | 2011-02-22 |
| 7862982 | Chemical trim of photoresist lines by means of a tuned overcoat material | Matthew E. Colburn, Steven J. Holmes, Wu-Song Huang | 2011-01-04 |