Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084185 | Substrate planarization with imprint materials and processes | Sean D. Burns, Ryan L. Burns | 2011-12-27 |
| 8023102 | Test method for determining reticle transmission stability | Timothy A. Brunner, Michael B. Pike | 2011-09-20 |
| 7917309 | System and method for detection and prevention of influx of airborne contaminants | — | 2011-03-29 |