Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023102 | Test method for determining reticle transmission stability | Colin J. Brodsky, Michael B. Pike | 2011-09-20 |
| 8001495 | System and method of predicting problematic areas for lithography in a circuit design | Stephen E. Greco, Bernhard R. Liegl, Hua Xiang | 2011-08-16 |
| 7901864 | Radiation-sensitive composition and method of fabricating a device using the radiation-sensitive composition | Wu-Song Huang, Marie Angelopoulos, Dirk Pfeiffer, Ratnam Sooriyakumaran | 2011-03-08 |