Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039203 | Integrated circuits and methods of design and manufacture thereof | Helen Wang, Scott D. Halle, Henning Haffner, Haoren Zhuang, Klaus Herold +4 more | 2011-10-18 |
| 7993815 | Line ends forming | Matthew E. Colburn, Scott D. Halle, Donald J. Samuels | 2011-08-09 |
| 7968270 | Process of making a semiconductor device using multiple antireflective materials | Marie Angelopoulos, Katherina Babich, Sean D. Burns, Richard A. Conti, Scott D. Halle +2 more | 2011-06-28 |
| 7914975 | Multiple exposure lithography method incorporating intermediate layer patterning | Sean D. Burns, Scott D. Halle, Dirk Pfeiffer | 2011-03-29 |