Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071261 | Lithography masks and methods of manufacture thereof | Alois Gutmann, Sajan Marokkey, Henning Haffner, Chandrasekhar Sarma, Matthias Lipinski | 2011-12-06 |
| 8067135 | Metrology systems and methods for lithography processes | Chandrasekhar Sarma, Jingyu Lian, Matthias Lipinski | 2011-11-29 |
| 8063406 | Semiconductor device having a polysilicon layer with a non-constant doping profile | Matthias Lipinski, Jingyu Lian, Chandrasekhar Sarma | 2011-11-22 |
| 8039203 | Integrated circuits and methods of design and manufacture thereof | Helen Wang, Scott D. Halle, Henning Haffner, Klaus Herold, Matthew E. Colburn +4 more | 2011-10-18 |
| 8007985 | Semiconductor devices and methods of manufacturing thereof | Matthias Lipinski, Alois Gutmann, Jingyu Lian, Chandrasekhar Sarma | 2011-08-30 |