Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071261 | Lithography masks and methods of manufacture thereof | Alois Gutmann, Henning Haffner, Chandrasekhar Sarma, Haoren Zhuang, Matthias Lipinski | 2011-12-06 |
| 7947431 | Lithography masks and methods of manufacture thereof | Chandrasekhar Sarma, Alois Gutmann, Henning Haffner, Josef Maynollo | 2011-05-24 |