Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071261 | Lithography masks and methods of manufacture thereof | Alois Gutmann, Sajan Marokkey, Henning Haffner, Haoren Zhuang, Matthias Lipinski | 2011-12-06 |
| 8067135 | Metrology systems and methods for lithography processes | Jingyu Lian, Matthias Lipinski, Haoren Zhuang | 2011-11-29 |
| 8063406 | Semiconductor device having a polysilicon layer with a non-constant doping profile | Haoren Zhuang, Matthias Lipinski, Jingyu Lian | 2011-11-22 |
| 8007985 | Semiconductor devices and methods of manufacturing thereof | Matthias Lipinski, Alois Gutmann, Jingyu Lian, Haoren Zhuang | 2011-08-30 |
| 7947431 | Lithography masks and methods of manufacture thereof | Alois Gutmann, Henning Haffner, Sajan Marokkey, Josef Maynollo | 2011-05-24 |
| 7863130 | Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit | Matthias Hierlemann | 2011-01-04 |