Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067135 | Metrology systems and methods for lithography processes | Chandrasekhar Sarma, Matthias Lipinski, Haoren Zhuang | 2011-11-29 |
| 8063406 | Semiconductor device having a polysilicon layer with a non-constant doping profile | Haoren Zhuang, Matthias Lipinski, Chandrasekhar Sarma | 2011-11-22 |
| 8007985 | Semiconductor devices and methods of manufacturing thereof | Matthias Lipinski, Alois Gutmann, Chandrasekhar Sarma, Haoren Zhuang | 2011-08-30 |