Issued Patents 2011
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053368 | Method for removing residues from a patterned substrate | Sean D. Burns, Matthew E. Colburn | 2011-11-08 |
| 8039334 | Shared gate for conventional planar device and horizontal CNT | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters | 2011-10-18 |
| 8009268 | Immersion optical lithography system having protective optical coating | Toshiharu Furukawa, Charles W. Koburger, III, Naim Moumen | 2011-08-30 |
| 8004024 | Field effect transistor | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2011-08-23 |
| 7994575 | Metal-oxide-semiconductor device structures with tailored dopant depth profiles | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2011-08-09 |
| 7994060 | Dual exposure track only pitch split process | Sean D. Burns, Matthew E. Colburn | 2011-08-09 |
| 7989222 | Method of making integrated circuit chip utilizing oriented carbon nanotube conductive layers | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell | 2011-08-02 |
| 7985643 | Semiconductor transistors with contact holes close to gates | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, William R. Tonti | 2011-07-26 |
| 7951660 | Methods for fabricating a metal-oxide-semiconductor device structure | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2011-05-31 |
| 7932549 | Carbon nanotube conductor for trench capacitors | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2011-04-26 |
| 7932167 | Phase change memory cell with vertical transistor | Toshiharu Furukawa, John G. Gaudiello, Mark C. Hakey, David V. Horak, Charles W. Koburger, III +1 more | 2011-04-26 |
| 7923202 | Layer patterning using double exposure processes in a single photoresist layer | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2011-04-12 |
| 7922796 | Chemical and particulate filters containing chemically modified carbon nanotube structures | Mark C. Hakey, David V. Horak, James G. Ryan | 2011-04-12 |
| 7898045 | Passive electrically testable acceleration and voltage measurement devices | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Leah Pastel | 2011-03-01 |
| 7892968 | Via gouging methods and related semiconductor structure | Shyng-Tsong Chen, David V. Horak, Takeshi Nogami, Shom Ponoth, Chih-Chao Yang | 2011-02-22 |
| 7888241 | Selective deposition of germanium spacers on nitride | Ashima B. Chakravarti, Anthony I. Chou, Toshiharu Furukawa, Wesley C. Nazle | 2011-02-15 |
| 7889317 | Immersion lithography with equalized pressure on at least projection optics component and wafer | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Peter H. Mitchell | 2011-02-15 |
| 7883829 | Lithography for pitch reduction | Xuefeng Hua, Willard E. Conley | 2011-02-08 |
| 7862982 | Chemical trim of photoresist lines by means of a tuned overcoat material | Sean D. Burns, Matthew E. Colburn, Wu-Song Huang | 2011-01-04 |