Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989222 | Method of making integrated circuit chip utilizing oriented carbon nanotube conductive layers | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2011-08-02 |
| 7889317 | Immersion lithography with equalized pressure on at least projection optics component and wafer | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak | 2011-02-15 |