Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7869002 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Dario L. Goldfarb | 2011-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7869002 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Dario L. Goldfarb | 2011-01-11 |