Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084193 | Self-segregating multilayer imaging stack with built-in antireflective properties | Joy Cheng, Dario L. Goldfarb, Daniel P. Sanders, Dirk Pfeifer, Libor Vylicky | 2011-12-27 |
| 7960095 | Use of mixed bases to enhance patterned resist profiles on chrome or sensitive substrates | Wayne M. Moreau, Marie Angelopoulos, Wu-Song Huang, Karen E. Petrillo | 2011-06-14 |
| 7875408 | Bleachable materials for lithography | John A. Hoffnagle, Robert D. Miller, Libor Vycklicky, Gregory Michael Wallraff | 2011-01-25 |