Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029975 | Fused aromatic structures and methods for photolithographic applications | Wu-Song Huang, Pushkara R. Varanasi, Roy R. Yu | 2011-10-04 |
| 7994639 | Microelectronic structure including dual damascene structure and high contrast alignment mark | Gerald W. Gibson, Mary B. Rothwell, Roy R. Yu | 2011-08-09 |
| 7893549 | Microelectronic lithographic alignment using high contrast alignment mark | Mary B. Rothwell, Robert Luke Wisneiff, Roy R. Yu | 2011-02-22 |