| 8031404 |
Fly's eye integrator, illuminator, lithographic apparatus and method |
— |
2011-10-04 |
| 8018578 |
Pellicle, lithographic apparatus and device manufacturing method |
Arno Jan Bleeker |
2011-09-13 |
| 8018574 |
Lithographic apparatus, radiation system and device manufacturing method |
Robert Rafilevitch Gayazov, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili +1 more |
2011-09-13 |
| 7935218 |
Optical apparatus, lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Carolus Ida Maria Antonius Spee, Rik Jansen |
2011-05-03 |
| 7928412 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more |
2011-04-19 |
| 7897110 |
System and method for detecting at least one contamination species in a lithographic apparatus |
Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm |
2011-03-01 |
| 7889312 |
Apparatus comprising a rotating contaminant trap |
Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink |
2011-02-15 |
| 7875863 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Mandeep Singh, Harm-Jan Voorma, Derk Jan Wilfred Klunder |
2011-01-25 |
| 7872244 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Arno Jan Bleeker, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun +1 more |
2011-01-18 |
| 7868304 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink +1 more |
2011-01-11 |
| 7863591 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2011-01-04 |
