Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959310 | Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element | Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein +8 more | 2011-06-14 |
| 7935218 | Optical apparatus, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Bastiaan Theodoor Wolschrijn, Carolus Ida Maria Antonius Spee, Rik Jansen | 2011-05-03 |
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more | 2011-04-19 |
| 7897110 | System and method for detecting at least one contamination species in a lithographic apparatus | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm | 2011-03-01 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink +1 more | 2011-01-11 |