Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018572 | Lithographic apparatus and radiation system | — | 2011-09-13 |
| 8018576 | Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device | — | 2011-09-13 |
| 7889312 | Apparatus comprising a rotating contaminant trap | Johannes Christiaan Leonardus Franken, Vadim Yevgenyevich Banine | 2011-02-15 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken +1 more | 2011-01-11 |