Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897941 | Lithographic apparatus, device manufacturing method, and use of a radiation collector | Alexander Matthijs Struycken, Leon Joseph Maria Van Den Schoor | 2011-03-01 |
| 7889312 | Apparatus comprising a rotating contaminant trap | Vadim Yevgenyevich Banine, Arnoud Cornelis Wassink | 2011-02-15 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Arnoud Cornelis Wassink +1 more | 2011-01-11 |
| 7863591 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Olav Waldemar Vladimir Frijns +1 more | 2011-01-04 |