Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077287 | Method of preparing components, prepared component, lithographic apparatus and device manufacturing method | Johannes Adrianus Antonius Theodorus Dams, Mark Kroon, Harm-Jan Voorma | 2011-12-13 |
| 7935218 | Optical apparatus, lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Bastiaan Theodoor Wolschrijn, Rik Jansen | 2011-05-03 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink +1 more | 2011-01-11 |