Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077287 | Method of preparing components, prepared component, lithographic apparatus and device manufacturing method | Johannes Adrianus Antonius Theodorus Dams, Harm-Jan Voorma, Carolus Ida Maria Antonius Spee | 2011-12-13 |
| 8035798 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert | 2011-10-11 |
| 7907255 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert | 2011-03-15 |