Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068212 | Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements | M'hamed Akhssay, Mamoun El Ouasdad, Asis Uasghiri | 2011-11-29 |
| 8049864 | Device manufacturing method and lithographic apparatus | Haico Victor Kok, Johannes Jacobus Matheus Baselmans | 2011-11-01 |
| 8045134 | Lithographic apparatus, control system and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk, Nicolas Lallemant | 2011-10-25 |
| 8035798 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2011-10-11 |
| 7907255 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2011-03-15 |
| 7889315 | Lithographic apparatus, lens interferometer and device manufacturing method | — | 2011-02-15 |