Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054445 | Lithographic apparatus and device manufacturing method | Hans Jansen, Christiaan Alexander Hoogendam, Anthonie Kuijper | 2011-11-08 |
| 8035798 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert | 2011-10-11 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Laurentius Catrinus Jorritsma +2 more | 2011-04-12 |
| 7907255 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert | 2011-03-15 |
| 7903234 | Lithographic apparatus, device manufacturing method and computer program product | Judocus Marie Dominicus Stoeldraijer, Erik Roelof Loopstra, Heine Melle Mulder, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma +1 more | 2011-03-08 |