Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059266 | Radiometric Kirk test | David A. Hult, Minne Cuperus | 2011-11-15 |
| 8052289 | Mirror array for lithography | Marius Ravensbergen | 2011-11-08 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Arno Jan Bleeker, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2011-04-12 |
| 7903234 | Lithographic apparatus, device manufacturing method and computer program product | Judocus Marie Dominicus Stoeldraijer, Erik Roelof Loopstra, Timotheus Franciscus Sengers, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma +1 more | 2011-03-08 |
| 7872731 | Lithographic apparatus and device manufacturing method | Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Erik Martijn Greijdanus | 2011-01-18 |