Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7872731 | Lithographic apparatus and device manufacturing method | Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Heine Melle Mulder | 2011-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7872731 | Lithographic apparatus and device manufacturing method | Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Heine Melle Mulder | 2011-01-18 |