Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952685 | Illuminator for a lithographic apparatus and method | Michel Fransois Hubert Klaassen, Bernd Geh, Emil Peter Schmitt-Weaver | 2011-05-31 |
| 7872731 | Lithographic apparatus and device manufacturing method | Michel Fransois Hubert Klaassen, Heine Melle Mulder, Erik Martijn Greijdanus | 2011-01-18 |