Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961297 | Method for determining intensity distribution in the image plane of a projection exposure arrangement | Joern Greif-Wuestenbecker, Beate Boehme, Ulrich Stroessner, Michael Totzeck, Vladimir Kamenov +3 more | 2011-06-14 |
| 7952685 | Illuminator for a lithographic apparatus and method | Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Emil Peter Schmitt-Weaver | 2011-05-31 |