Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2011-11-08 |
| 8018578 | Pellicle, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2011-09-13 |
| 7965380 | Lithographic apparatus and device manufacturing method | Kars Zeger Troost | 2011-06-21 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2011-04-12 |
| 7911586 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Pieter Willem Herman De Jager | 2011-03-22 |
| 7894041 | Limiting a portion of a patterning device used to pattern a beam | — | 2011-02-22 |
| 7894037 | Lithographic apparatus and device manufacturing method | Aschwin Lodewijk Hendricus Johannes Van Meer | 2011-02-22 |
| 7872244 | Lithographic apparatus and device manufacturing method | Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun +1 more | 2011-01-18 |