Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2011-11-08 |
| 7916927 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Hugo Augustinus Joseph Cramer, Durk Oeds Van Der Ploeg, Goce Naumoski, Roland Mark Van Weel | 2011-03-29 |
| 7911612 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2011-03-22 |