Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7916284 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Mircea Dusa, Arie Jeffrey Den Boef | 2011-03-29 |
| 7916927 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Antoine Gaston Marie Kiers, Durk Oeds Van Der Ploeg, Goce Naumoski, Roland Mark Van Weel | 2011-03-29 |