Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2011-11-08 |
| 7916284 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer | 2011-03-29 |