Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2011-11-08 |