Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7916927 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers, Goce Naumoski, Roland Mark Van Weel | 2011-03-29 |