Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948606 | Moving beam with respect to diffractive optics in order to reduce interference patterns | Huibert Visser, Johannes Jacobus Matheus Baselmans, Henri Johannes Petrus Vink | 2011-05-24 |
| 7911586 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Arno Jan Bleeker | 2011-03-22 |
| 7880875 | Apparatus and method for inspecting circuit structures | Kees Moddemeyer, Henri Johannes Petrus Vink | 2011-02-01 |