| 8049864 |
Device manufacturing method and lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerkhof |
2011-11-01 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2011-06-14 |
| 7948606 |
Moving beam with respect to diffractive optics in order to reduce interference patterns |
Huibert Visser, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink |
2011-05-24 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2011-05-03 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2011-03-01 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2011-02-01 |
| 7864295 |
Lithographic apparatus and device manufacturing method utilizing data filtering |
Patricius Aloysius Jacobus Tinnemans |
2011-01-04 |