Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982856 | Lithographic apparatus and device manufacturing method | — | 2011-07-19 |
| 7961293 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more | 2011-06-14 |
| 7961296 | Lithographic apparatus and device manufacturing method | — | 2011-06-14 |