| 8045135 |
Lithographic apparatus with a fluid combining unit and related device manufacturing method |
Matthew Lipson, Harry Sewell, Louis John Markoya |
2011-10-25 |
| 8027026 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk, Ronald A. Wilklow +1 more |
2011-09-27 |
| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2011-07-19 |
| 7969549 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Huibert Visser, Peter Julian Pollard |
2011-06-28 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2011-06-14 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2011-05-03 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2011-04-26 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2011-03-01 |
| 7894040 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk, Ronald A. Wilklow +1 more |
2011-02-22 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2011-02-01 |
| 7868998 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2011-01-11 |