| 8023101 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Michel Riepen, Sergei Shulepov |
2011-09-20 |
| 8003968 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper |
2011-08-23 |
| 7978306 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Noud Jan Gilissen |
2011-07-12 |
| 7969549 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Borgert Kruizinga, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard |
2011-06-28 |
| 7929112 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +3 more |
2011-04-19 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2011-04-19 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2011-03-29 |
| 7903232 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Martin Anton Bos |
2011-03-08 |
| 7864292 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
2011-01-04 |