Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027019 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Edwin Cornelis Kadijk, Sergei Shulepov | 2011-09-27 |
| 8003968 | Lithographic apparatus and substrate edge seal | Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders | 2011-08-23 |
| 7978306 | Lithographic apparatus and device manufacturing method | Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders | 2011-07-12 |
| 7864292 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper | 2011-01-04 |