Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8031325 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more | 2011-10-04 |
| 8027019 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov | 2011-09-27 |
| 8003968 | Lithographic apparatus and substrate edge seal | Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders | 2011-08-23 |
| 7864292 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens | 2011-01-04 |