Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045134 | Lithographic apparatus, control system and device manufacturing method | Marcus Adrianus Van De Kerkhof, Tammo Uitterdijk, Nicolas Lallemant | 2011-10-25 |
| 8018573 | Lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Martinus Cornelis Maria Verhagen, Hans Jansen | 2011-09-13 |
| 8003968 | Lithographic apparatus and substrate edge seal | Joost Jeroen Ottens, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders | 2011-08-23 |
| 8004654 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Nicolaas Ten Kate, Ferdy Migchelbrink | 2011-08-23 |
| 7924403 | Lithographic apparatus and device and device manufacturing method | Paulus Martinus Maria Liebregts, Tammo Uitterdijk | 2011-04-12 |
| 7914687 | Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method | Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay | 2011-03-29 |