| 8054445 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Timotheus Franciscus Sengers, Anthonie Kuijper |
2011-11-08 |
| 8045137 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2011-10-25 |
| 8018573 |
Lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs |
2011-09-13 |
| 8011377 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-09-06 |
| 8003029 |
Method for preventing deposit forming on guide rollers |
Stephanus Willemsen |
2011-08-23 |
| 7969548 |
Lithographic apparatus and lithographic apparatus cleaning method |
Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers, Raymond Gerardus Marius Beeren |
2011-06-28 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2011-04-26 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2011-04-19 |
| 7929112 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2011-04-19 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2011-03-29 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2011-03-29 |
| 7900641 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-03-08 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +5 more |
2011-03-01 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2011-02-01 |