Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011377 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen +2 more | 2011-09-06 |
| 7969548 | Lithographic apparatus and lithographic apparatus cleaning method | Marco Koert Stavenga, Hans Jansen, Peter Franciscus Wanten, Raymond Gerardus Marius Beeren | 2011-06-28 |
| 7900641 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen +2 more | 2011-03-08 |