Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011377 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more | 2011-09-06 |
| 7969548 | Lithographic apparatus and lithographic apparatus cleaning method | Marco Koert Stavenga, Hans Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers, Raymond Gerardus Marius Beeren | 2011-06-28 |
| 7916269 | Lithographic apparatus and contamination removal or prevention method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Jacques Cor Johan Van Der Donck +4 more | 2011-03-29 |
| 7900641 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more | 2011-03-08 |