Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004652 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more | 2011-08-23 |
| 7924404 | Lithographic apparatus and device manufacturing method | — | 2011-04-12 |
| 7916269 | Lithographic apparatus and contamination removal or prevention method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more | 2011-03-29 |
| 7866637 | Humidifying apparatus, lithographic apparatus and humidifying method | — | 2011-01-11 |