Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011377 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more | 2011-09-06 |
| 7900641 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more | 2011-03-08 |
| 7866330 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong, Kornelis Tijmen Hoekerd | 2011-01-11 |