| 8045137 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2011-10-25 |
| 8018573 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen |
2011-09-13 |
| 8011377 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-09-06 |
| 7969548 |
Lithographic apparatus and lithographic apparatus cleaning method |
Hans Jansen, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers, Raymond Gerardus Marius Beeren |
2011-06-28 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2011-03-29 |
| 7900641 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-03-08 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2011-02-01 |